They take 28 days at least to hatch so it may be hard to tell at this point if they are alright or not. I would just hang in there until I was absolutely sure they are dead before giving up. Good luck.Good job for rescuing them! If the humidity isn’t working, I would mist them or put a damp towel in the incubator with them. Incubate them for a couple days, and if you see no visible development, then toss them. Good luck and keep us updated! Also welcome to BYC!